Semiconductor Inspection and Measurement

VisionGauge® High-Accuracy Inspection & Measurement Systems are the Perfect Solution For Checking Semiconductors!

The VisionGauge® High-Accuracy Inspection & Measurement Systems are an excellent solution both wafer and die level inspection of semiconductors. These systems have extensive measurement, pattern matching, and defect detection tools and they are extremely easy to program. This makes them especially well-suited to applications involving small lots and high changeover (such as R&D, prototyping, and small-batch-production applications). In many cases, they can be programmed using the part’s CAD data directly.

VisionGauge® systems can detect a wide range of physical & surface defects including: cracks & fractures, scratches, pits, chipping, contamination, particles, foreign materials, delamination, voids, pattern defects, bridges and shorts, feature misalignment, etc.

Automatically Detect Defects

Display a Real-Time Defect Map to View & Quickly Navigate and Review Defects

Measure Features to Very High Accuracy

We offer many different system configurations that all run the same VisionGauge® software. VisionGauge® has a very intuitive graphical user interface and is extremely easy to use. It has extensive data analysis, exchange, collection & reporting tools. Results can also be presented graphically (for example: a “defect map” can automatically be displayed).

VisionGauge® systems are flexible, widely applicable, and cost-effective solutions for detecting semiconductor defects with high precision.